搜索结果: 1-2 共查到“材料的组织、结构、缺陷与性能 CVD”相关记录2条 . 查询时间(0.078 秒)
Influence of the PVD and CVD technologies on the residual macro-stresses and functional properties of the coated tool ceramics
Tool ceramics PVD CVD
2009/12/14
Purpose: The goal of this work is to compare the macro-stresses as well as mechanical and functional properties of the PVD and CVD coatings deposited on oxide and nitride ceramics tool.
Design/method...
石墨表面CVD SiC涂层微观结构研究
化学气相沉积 SiC涂层
2013/10/8
研究CH3SiCl3-H2-Ar体系中在石墨表面化学气相沉积SiC涂层工艺,并对涂层形貌进行SEM分析。考察沉积温度、气体比例、气体流量以及稀释气体含量对化学气相沉积SiC涂层的显微结构的影响。结果表明,在温度1100℃,H2:MTS=5:3,气体流量8L/min,稀释气体1L/min时,制备的涂层致密光滑。其中涂层的形貌对温度最敏感,当沉积温度达到1100℃时,CVD SiC涂层表面致密且光滑。