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Improvement of temperature uniformity in rapid thermal processing systems using multivariable control
Temperature uniformity rapid heat treatment system a semiconductor chip the chip temperature distribution the chip
2015/8/12
During rapid thermal processing (RTP) of a semiconductor wafer, maintenance of near-uniform wafer temperature distribution is necessary. This paper addresses the problem of insuring temperature unifor...
Overload Behavior of Cone Schedules for Processing Systems
Overload Behavior Cone Schedules Processing Systems
2010/11/11
This note complements the analysis of [1] and [2] addressing the case where the traffic load is not within the stability region, that is, the system operates in overload. For the case where the cone s...
Snow Cover Mapping using Microcomputer Image Processing Systems
Snow Cover Microcomputer Image Processing Systems
2009/10/26
For many years, digital snow cover mapping using satellite data had to be
carried out on large and expensive image processing systems. Recently, small
computer systems (microcomputers) have been dev...