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Printing via Photolithography on Micropartitioned Fluid Lipid Membranes
Lipid membranes Liquid surfaces Micropatterning
2016/5/23
In a fluid medium there is continuous diffusive mixing among components. In order to retain spatial information such as a concentration gradient or an image in the absence of external forces, the flui...
Electromagnetic Modeling of Photolithography Aerial Image Formation Using the Octree Finite Element Method
aerial image finite element method photolithography electromagnetics octree simulation
2014/12/8
Modern semiconductor manufacturing requires photolithographic printing of subillumination wavelength features in photoresist via electromagnetic energy scattered by complicated photomask designs. This...
Microlens Array Fabricated by Excimer Laser Micromachining with Gray-tone Photolithography
excimer laser gray-tone photolithography SIL
2011/11/28
We demonstrate the fabrication of a refractive microlens array by using 248 nm excimer laser micromachining with coded gray-tone mask photolithography. With pre-corrections to the nonlinear exposure p...