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Ge-on-Si Photodetectors with 33 GHz Bandwidth Implemented by RPCVD
Photodetectors Bandwidth Implemented RPCVD
2015/7/31
We report Ge-on-Si photodetectors fabricated by RPCVD showing 3-dB bandwidth of 33 GHz for the window size of 20 μ m-diameter at a wavelength of 1550 nm.