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Heterogeneously Integrated SOI Compound Semiconductor Photonics
Heterogeneously Integrated SOI Compound Semiconduc Photonics
2015/7/15
We present a review of recent progress in III-V on silicon heterogeneous integration technology. Both fabrication technology and devices are discussed.
In this paper, progress in compound semiconductor devices and ICs is reviewed.Emphasis is laid on the status of the research and development in our institute in the areas such as GaAs very high speed ...