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Application of elastic mid-IR light scattering for inspection of internal gettering operations
mid-IR light scattering gettering
2011/9/9
A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in
CZ Si crystals. A classification of sca...
Simple self-gettering differential-pump for minimizing source oxidation in oxide-MBE environment
self-gettering differential-pump oxide-MBE minimizing source oxidation
2011/9/9
Source oxidation of easily oxidizing elements such as Ca, Sr, Ba, and Ti in an oxidizing ambient leads to their flux instability and is one of the biggest problems in the multi-elemental oxide Molecul...
An Introduction to Gold Gettering in Silicon.