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Hydrogen Influence on Gallium Arsenide Thin Films Prepared by RF-Magnetron Sputtering Technique
Hydrogen Gallium arsenide RF-magnetron sputtering
2010/9/29
We investigate the effect of the hydrogen intentional incorporation on the structural properties of the amorphous gallium arsenide prepared by rf-magnetron sputtering technique. The properties of the ...
Nanocrystalline GaN and GaN:H Films Grown by RF-Magnetron Sputtering
GaN GaN:H Nanocrystalline Sputtering Hydrogenation
2010/9/29
The structural and optical properties of nanocrystalline GaN and GaN:H films grown by RF-magnetron sputtering are focused here. The films were grown using a Ga target and a variety of deposition param...