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Symbiotic Optimization of the Nanolithography and RF-Plasma Etching for Fabricating High-Quality Light-Sensitive Superconductors on the 50 nm Scale
Symbiotic Optimization Nanolithography High-Quality Light-Sensitive Superconductors
2010/11/24
We present results of a fabrication-process development for the lithographic pattern transfer into the nm100sub range by combining electron-beam lithography and reactive dry etching to obtain ...