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Adherent Diamond-Like Carbon Coatings on Metals Via PECVD and IBAD
Diamond-like carbon Plasma enhanced chemical vapor deposition Ion beam-assisted deposition
2010/9/29
Adherent and low-stress a-C:H films were deposited on Ti6Al4V and stainless steel substrates using PECVD and IBAD techniques. An amorphous silicon interlayer was applied to improve the adhesion of the...