搜索结果: 1-2 共查到“工学 photolithography”相关记录2条 . 查询时间(0.056 秒)
Electromagnetic Modeling of Photolithography Aerial Image Formation Using the Octree Finite Element Method
aerial image finite element method photolithography electromagnetics octree simulation
2014/12/8
Modern semiconductor manufacturing requires photolithographic printing of subillumination wavelength features in photoresist via electromagnetic energy scattered by complicated photomask designs. This...
Microlens Array Fabricated by Excimer Laser Micromachining with Gray-tone Photolithography
excimer laser gray-tone photolithography SIL
2011/11/28
We demonstrate the fabrication of a refractive microlens array by using 248 nm excimer laser micromachining with coded gray-tone mask photolithography. With pre-corrections to the nonlinear exposure p...