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Effect of Deposition Conditions on Composition of rf-sputtered Bi-Sr-Ca-Cu-O Thin Films
rf-sputtered Bi-Sr-Ca-Cu-O on-axis configuration
2010/4/19
The effect of rf-magnetron sputtering conditions on as-deposited film composition using a stoichiometric Bi2Sr2CaCu2Oy (Bi-2212) target was investigated in an on-axis configuration, as the stoichiomet...